为了满足半导体缺陷检测系统对成像系统高分辨的要求，依据系统的特点和设计指标，设计了一种近紫外-可见光大数值孔径折反式物镜。在近紫外-可见光波段对光学玻璃材料的色散特性进行分析，通过二级光谱理论计算，选择合适的玻璃材料，对光学系统的二级光谱进行了校正。该物镜使用11片球面透镜，结构紧凑。设计出一套光谱范围为360~520 nm、数值孔径为0.9、焦距为5.65 mm、视场大小为0.8 mm、工作距离为0.8 mm的物镜，采用无限远共轭折反式结构。设计结果表明：该物镜的MTF较好，全视场波像差小于0.09λ(λ=632.8 nm)，各种几何像差均得到了较好的校正，满足复消色差条件，并且结构简单，具有较长的工作距离，为实际的生产装配和应用提供了便利。

计算全息图被广泛应用于高精度离轴非球面面形检测，为提升低反射率材料检测过程中的条纹对比度，提出了一种混合型计算全息图，对准区域使用反射型全息图，基于衍射效率模型给出了最佳对比度对应的膜层反射率，主区域使用位相型全息图实现衍射效率的提升，从而提升检测区域的条纹对比度。通过多步半导体工艺实现混合全息图的加工，并对某微晶材料离轴非球面进行检测，实验结果表明：该混合型计算全息图可以获得清晰的条纹对比度，最终检测精度优于0.02λ （λ=632.8 nm），该混合型计算全息图可广泛应用于低反射率非球面检测。

工业镜头元件口径小、数量多、精度要求高，将自由曲面用在镜头凸面上会导致面形复杂、偏离量大，对表面面形检测提出了很高的挑战。提出了基于计算全息板（Computer-Generated-Hologram, CGH）的干涉检测方法，并利用Zemax对光路进行优化设计，建立了镜头装夹误差对检测结果的影响分析模型，提出了镜头高精度干涉检测方案，并结合实验验证了分析模型和检测方案的可靠性。实验结果表明：利用CGH可实现凸自由曲面工业镜头的全口径干涉检测，检测结果为0.57 μm PV（满足镜头检测需求），并结合轮廓仪对比验证了干涉测量的可靠性。

The demand for space-borne telescopes with an aperture of 20 m is forcing the development of large diameter diffractive Fresnel zone lenses (FZLs) on membranes. However, due to the fabrication errors of multi-level microstructures, the real diffraction efficiency is always significantly smaller than the theoretical value. In this Letter, the effects of a set of fabrication errors on the diffraction efficiency for a diffractive membrane are studied. In order to verify the proposed models, a 4-level membrane FZL with a diameter of 320 mm is fabricated. The fabrication errors of the membrane FZL are measured, and its diffraction efficiency in the +1 order is also tested. The results show that the tested diffraction efficiency is very close to the calculated value based on the proposed models. It is expected that the present work could play a theoretical guiding role in the future development of space-borne diffractive telescopes.